Kirigami Strain Sensors Microfabricated From Thin-Film Parylene C
نویسندگان
چکیده
منابع مشابه
Development of FeNiMoB thin film materials for microfabricated magnetoelastic sensors
Related Articles Spacer-less, decoupled granular L10 FePt magnetic media using Ar–He sputtering gas J. Appl. Phys. 112, 113916 (2012) Room-temperature ferromagnetism induced and controlled by electric field in BaNbO3 films Appl. Phys. Lett. 101, 232407 (2012) Phase diagrams of strained Ca1–xCexMnO3 films J. Appl. Phys. 112, 113703 (2012) Spin waves and small intrinsic damping in an in-plane mag...
متن کاملMechanical Properties of Thin-Film Parylene–Metal–Parylene Devices
Structures and testing methods for measuring the adhesion strength, minimum bending diameter, and bending fatigue performance of thin-film polymer electronic architectures were developed and applied to Parylene–metal–Parylene systems with and without the moisture barrier Al2O3 [deposited using atomic layer deposition (ALD)]. Parylene–metal– Parylene interfaces had the strongest average peel tes...
متن کاملR2-C.1: Thin Film Fluorescent Sensors for Explosives Detection
A fl uorescence sensor array is being developed to detect explosives at ambient temperature and atmospheric conditions. The sensor platform uses a multilayer substrate that serves to amplify the emission signal by more than three orders of magnitude, improving the sensor response accordingly. Studies to understand the mechanism of the signal amplifi cation are being undertaken so that the senso...
متن کاملPermalloy thin-film magnetic sensors
An mtroductlon to the theory of the amsotroplc magnetoresistance effect m ferromagnetic thm films IS given, endmg m a treatment of the mmlmahzatlon of the free energy which IS the result of the lntnnslc and extnnslc anlsotroples of the thm-film structure The amsotroplc magnetoreslstance effect m long stnps IS revlewed Attention IS given to problems hke the formation of domains and measures hke ...
متن کاملRobust mechanical property measurements of fibrous parylene-C thin-film substrate via moiré contouring technology.
Parylene-C is a bio-inert, bio-compatible and relatively inexpensive material with many bio-medical applications from coatings for implantable devices to bio-scaffolds. The main objective of this research was to demonstrate a novel approach to accurately measure the mechanical properties of free-standing fibrous thin-film substrates (TFS) of parylene-C. For that purpose, a two-stage experimenta...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 2018
ISSN: 1057-7157,1941-0158
DOI: 10.1109/jmems.2018.2869090